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國標(biāo)氣體鋼瓶接頭的對照表如下：
GAS TYPE 氣體分子式 氣體種類 標(biāo)準(zhǔn) CGA接頭 UHP CGA DIN JIS
High Purity Gas 高純氣體W21.8-14RHF 180 350
Acetylene C2H2 乙炔 軋?zhí)m 200/300/510 N/A N/A N/A
Air Air 空氣 G5/8"-RHF 346/590 N/A N/A N/A
Ammonia NH3 氨氣 G1/2"-RHF 705 720 DIN6 22-R
Argon Ar 氬氣 G5/8"-RHF 580 718 DIN6 22-4O/23-R
Arsine AsH3 N/A 350 632 N/A 22-l
Boron Trichloride BCl3 三氯化硼 G3/4"-RHF/ W21.8-14RHF660 634 DIN8 N/A
Boron TrifluorideBF3 G3/4"-RHF/ W21.8-14RHF330 642 DIN8 22-l
Butane C4H8 丁烷 瓦斯 M22*1.5-LHM 510 N/A N/AN/A
Carbon DioxideCO2 二氧化碳G5/8"-RHF 320 716 DIN6N/A
Carbon MonoxedeCO 一氧化碳W21.8-14LHF 350 724 DIN522-l
Cyclopropane C3H6 環(huán)丙烷M22*1.5-LHM 510 N/A N/AN/A
Diborane B2H6 N/A 350 632 N/A22-l
Dichlorosilane CH3SHCl2 二氯甲硅烷 N/A 678 636 DIN5N/A
Diethylzinc (CH3CH2)2Zn 二乙基鋅 N/A 510 726 N/AN/A
Ethane C2H6 乙烷 M22*1.5-LHM 350 N/A N/AN/A
Ethyl Chloride C2H5Cl 氯乙烷 G3/4"-RHF 510 N/A N/AN/A
Ethylene C2H4 乙烯 M22*1.5-LHM 350 N/A N/AN/A
Ethylene Oxide CH2CH2O 環(huán)氧乙烷 G5/8"-RHF/ G3/4"-RHF510 N/A N/AN/A
Germane GeH4 鍺烷 N/A 350or660 632 N/AN/A
Halocarbon11(116) R11(R116) G3/4"-RHF 660 716 N/AN/A
Halocarbon12 R12(R13,R23,R115) G3/4"-RHF 660 716 DIN6N/A
Halocarbon14 R14 G3/4"-RHF 320/580 716 DIN6N/A
Helium He 氦氣 G5/8"-RHF 580 718 DIN622-R/23-R
Hydrogen H2 氫氣 W21.8-14LHF 350 724 DIN122-L
Hydrogen Chloride HCl G3/4"-RHF 330 634 DIN826-R
Hydrogen Fluoride HF 氟化氫 G3/4"-RHF/ W21.8-14RHF660/670 638 N/A26-R
Hydrogen Sulfide H2S 硫化氫 G3/4"-RHF/ W21.8-14RHF330 722 DIN5N/A
Iso-Butane I-C4H8 異丁烷 M22*1.5-LHM 510 N/A N/A N/A
Krypton Kr 氪 G5/8"-RHF 580 718 DIN622-R/23-R
Methane CH4 甲烷 W21.8-14LHF 350 N/A N/AN/A
Methyl ChlorideCH3Cl 氯甲烷 G3/4"-RHF/W21.8-14RHF660 N/A N/AN/A
Natural Gas 天然氣 W21.8-14LHF/M22*1.5-LHM350 N/A N/AN/A
Neon Ne 氖氣 G5/8"-RHF 580 718 DIN622-R/23-R
Nitric Oxide NO 一氧化氮 G3/4"-RHF/W21.8-14RHF660 N/A N/AN/A
Nitrogen N2 氮?dú)?span style="white-space:pre"> G5/8"-RHF 580 718 DIN1022-R/23-R
Nitrogen Trifluoride NCl3 三氯化氮 G3/4"-RHF/W21.8-14RHF330/670 640 DIN8N/A
Nitrous Oxide N2O 笑氣 G5/8"-RHF 326/660 712 DIN8N/A
Oxygen O2 氧氣 G5/8"-RHF 540 714 DIN922-R/23-R
Phosphine PH3 W21.8-14LHF 350 632 DIN1N/A
Propane C3H8 丙烷 M22*1.5-LHM 510 N/A N/AN/A
Silane SiH4 硅甲烷 G3/4"-RHF/W21.8-14RHF350 632 N/AN/A
Silicon Tetrachloride SiCl4 四氯化硅 G3/4"-RHF/W21.8-14RHF330 636 N/AN/A
Silicon Tetrafluoride SiF4 四氟化硅 G3/4"-RHF/W21.8-14RHF330 642 N/A22-L
Sulfur Hexafluoride SF6 六氟化硫G5/8"-RHF 590 716 DIN626-R
Tungsten Hexafluoride WF6 六氟化鎢 N/A 670 638 DIN8N/A
Xenon Xe 氙氣 G5/8"-RHF 580 718 DIN622-R
備注1:40L/10L不銹鋼瓶閥標(biāo)準(zhǔn)為G3/4"-RHF
備注2:10L以下標(biāo)準(zhǔn)氣體瓶閥標(biāo)準(zhǔn)為W21.8-14RHF
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